发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device which is decreased in resistance with good controllability and further improved in the integration level. SOLUTION: This semiconductor device includes a read-only semiconductor storage device, comprising diffusion regions 22 as source/drain regions arrayed on the top surface layer of a semiconductor device 21 in parallel to one another, 1st gate electrodes 24 which are arrayed on the semiconductor substrate 21 in parallel to one another across a 1st gate insulating film 23, while crossing the diffusion regions 22, and 2nd gate electrodes 26 formed on the semiconductor substrate 21 between the 1st gate electrodes 24 across a 2nd gate insulating film 25. The 2nd gate electrodes 26 contains high fusion-point metal in their top layers, and the surfaces of the 1st gate electrodes 23 and 2nd gate electrodes 26 are flat, respectively.
申请公布号 JP2000091449(A) 申请公布日期 2000.03.31
申请号 JP19980252614 申请日期 1998.09.07
申请人 SHARP CORP 发明人 GOTO TOSHIHISA;AOKI HITOSHI
分类号 H01L27/112;H01L21/8246 主分类号 H01L27/112
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