METHOD FOR CONSTRUCTING SEMICONDUCTOR WAFER PRODUCTION PROCESS SYSTEM

摘要

PROBLEM TO BE SOLVED: To realize a method for constructing a semiconductor wafer production process system capable of lessening a conveying distance of a wafer and taking partial charge of works appropriately in each operator. SOLUTION: This embodiment comprises a work unit dividing process of dividing a production process of a semiconductor wafer (step 101); a work module preparing process of collecting work units using the same facilities in combination (step 102); a work module group preparing process of allocating facilities in combination of a plurality of work modules from use frequencies of each facility in the work module, and setting this combination as a work module group (steps 103, 104); a work module group proximity evaluating process of evaluating proximity from frequencies of the number of times of transfer between work module groups in the production process (step 105); and a layout process of laying out the work module group near the work module group having high proximity centering the work module group having high use frequencies (step 106).