| 摘要 |
PROBLEM TO BE SOLVED: To make inexpensively and easily controllable the feeding device of a moving table using micro pitch racks by providing a reference side micro pitch rack fixed to a substrate and a movement side micro pitch rack which can move in parallel to the rack. SOLUTION: The reference-side micro pitch rack 2, movement-side micro pitch rack 3 and a reference-side retaining rack 8 and a movement-side retaining rack 9, which can be engaged to/detached from the racks 2 and 3 and are fixed to a moving table, a re installed. Currents are individually supplied to first to fourth solenoids 16-19 magnetizing the reference-side micro pitch rack 2, the movement-side micro pitch rack 3, the reference-side retaining rack 8 and the movement-side retaining rack 9 and the respective solenoids are individually magnetized. Thus, the reference-side micro pitch rack 2/the reference-side retaining rack 8 and the movement-side micro pitch rack 3/movement-side retaining rack 8 are mutually sucked or repelled.
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