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发明名称
Method of manufacturing semiconductor devices
摘要
申请公布号
GB1107620(A)
申请公布日期
1968.03.27
申请号
GB19670011698
申请日期
1967.03.13
申请人
MATSUSHITA ELECTRONICS CORPORATION
发明人
分类号
C23C16/16;H01L21/00;H01L29/00
主分类号
C23C16/16
代理机构
代理人
主权项
地址
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