发明名称 SURFACE AND VOLUME ELECTRICAL RESISTANCE MEASUREMENT DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a surface and volume electrical resistance measurement device with a structure that enables easily replacing a part. SOLUTION: A disc-like main electrode 11 and a ring electrode 12 placed so as to encircle a surrounding of the main electrode 11 are provided on an insulation circular platform equipped at a bottom face of a case 22. A sample 13 is mounted on the electrodes 11, 12 and an opposed electrode 14 is placed on the sample 13. A surface electrical resistance of the sample 13 is measured by applying a d-c voltage between the main electrode 11 and the ring electrode 12. In a surface and volume electrical resistance measurement device measuring a volume electrical resistance of the sample 13 by applying a d-c voltage between the main electrode 11 and the opposed electrode 14, a position determining means 30 is projected from the bottom face of the case 22 and the opposed electrode 14 is made so as to have a structure that supports attachably and detachably with the position determining means 30 and a conductive rubber 18 covering the opposed electrode 14 is easily replaced.
申请公布号 JP2000088901(A) 申请公布日期 2000.03.31
申请号 JP19980254059 申请日期 1998.09.08
申请人 ADVANTEST CORP 发明人 IWATANI FUMIHIRO
分类号 G01R27/02;(IPC1-7):G01R27/02 主分类号 G01R27/02
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