| 摘要 |
PROBLEM TO BE SOLVED: To provide a silicon gyro which allows the elastic leg span to be reduced, improves the sensitivity without needing a high driving voltage, and is made at a low cost. SOLUTION: The silicon gyro is formed from an Si wafer and has three elastic legs 2a, 2b, 2c separated by two grooves. A vibrator 1 supporting the elastic legs 2a, 2b, 2c has a base a part of which is fixed to a base 3. A vertical electrode 4 is disposed in parallel to the array plane of the elastic legs 2a, 2b, 2c and near the elastic legs 2a, 2b, 2c. |
