| 摘要 |
PROBLEM TO BE SOLVED: To realize a method to fast and efficiently cure a resist without leaving gas produced by irradiation of electron beams in the resist when the resist is to be cured by irradiation of electron beams. SOLUTION: In the treating method of a resist to increase its heat resistance by irradiation of electron beams, the method includes a first process to irradiate the resist with electron beams while heating the resist to a temp. at which forming does not occur, a process to heat the resist to emit the gas produced in the first process to the outside of the resist, and a third process to irradiate the resist with electron beams to polymerize and cure the resist after the second process. |
