发明名称 METHOD OF FORMING FUNCTIONAL BOND AT BONDING REGION BY INTER-SUBSTRATE JOINT REINFORCED BY MOLTEN BODY AND ELEMENT STRUCTURE HAVING FUNCTIONAL BOND
摘要 PROBLEM TO BE SOLVED: To obtain a jointing method in which jointing is performed by dividing a region into a joint portion for which a mechanical bond strength is ensured and a functional bond portion for which a functional bond is achieved, and to obtain a structure permitting such jointing. SOLUTION: This is a jointing method for obtaining a functional bond between bond regions 3 and 4 of substrates 1 and 2 made of the same or different materials. Structures having the regions 3 and 4 becoming a functional bond and joint regions 5 and 6 having joint portions 11 and 12 for giving a mechanical joint strength to the substrates 1 and 2 are formed on the substrates 1 and 2, respectively. Melting portions 13 are formed at the jointing region of at least one of the substrates. The region 5 or 6 and the region 3 or 4 of one of the substrates are positioned with respect to the corresponding regions of the other substrate, and the portions 11 and 12 are jointed by applying biasing forces to the substrates 1 and 2, respectively. The portions 13 are melted by means of a heat treatment to be solidified, thereby implementing a mechanical bond between the respective regions 3 and 4 of the substrates 1 and 2.
申请公布号 JP2000091173(A) 申请公布日期 2000.03.31
申请号 JP19980279443 申请日期 1998.09.14
申请人 CANON INC 发明人 AKAIKE MASATAKE
分类号 H01L21/02;(IPC1-7):H01L21/02 主分类号 H01L21/02
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