| 摘要 |
PROBLEM TO BE SOLVED: To obtain an evaluation method in which a current can be measured precisely by a method wherein the failure pin of a sample is connected to a power supply and a GND terminal is connected to an OBIC amplifier. SOLUTION: An OBIC amplifier 4 and a power supply 3 compose an OBIC apparatus which is built in a scanning laser microscope (including a confocal scanning laser microscope and a nonconfocal scanning laser microscope). By the OBIC amplifier 4, carriers which are generated when a laser is emitted are taken into as a current, and their data is sent to an A/D converter and D/A converter board 5. The power supply 3 gives a voltage to a sample 2. The sample 2 is a semiconductor device. An optical image which is observed by light reflected from the sample 2 is displayed. An OBIC image is observed by the carriers generated when the laser is emitted. The optical image and the OBIC image are overlapped, and a defect position inside the sample 2 is specified. When the defect place inside the sample 2 is known in advance, the power supply 3 is connected to a failure pin, and a current from a GND terminal at this time is detected by the OBIC amplifier 4.
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