| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized high-reliable acceleration switch. SOLUTION: In this acceleration switch 1, a moving part M1 is moved by application of an acceleration and hereby contacts 13a, 13b are closed. The moving part M1 is formed on a silicon chip 2 by using a surface micro- machining technique. The moving part M1 is composed by including a first inertial deadweight 7, a first beam 8, a second inertial deadweight 9, and a second beam 10 for connecting both inertial deadweights 7, 9. The first beam 8 supports the first inertial deadweight 7 rotatably on the eccentric position. The second inertial deadweight 9 is relatively lighter than the first inertial deadweight 7. |
