| 摘要 |
PROBLEM TO BE SOLVED: To provide an angular speed sensor having a function for detecting the variation of sensitivity due to failure or deterioration in which reliability is enhanced significantly. SOLUTION: The angular speed sensor comprises electrodes 2a, 2b constituting an exciting section for imparting oscillation to an oscillator 1, an electrode 3 constituting means for detecting the oscillation level of the oscillator 1, an electrode 4 constituting a first means for detecting Coriolis force being generated in correspondence with angular speed, a second detection electrode 5 for detecting a signal having polarity reverse to the first detection electrode 4, a drive circuit 6 receiving a signal from the electrode 3 for detecting oscillation level and delivering signals to the electrodes 2a, 2b, and first and second detection circuits 7, 8 receiving detection signals, respectively, from the first and second detection electrodes 4, 5. |
