| 摘要 |
PROBLEM TO BE SOLVED: To restrain the change of voltage due to a sudden change of a load current. SOLUTION: Force lines 11, 12 and a sense line 13 supply a current from a DC voltage generator on a side of an IC to be measured. A guard line for shielding 21 is provided around these force lines 11, 12 and sense line 13. The electrostatic capacities between the force lines 11, 12, and between the sense line 13 and the guard line 21 are equivalent to conventional cables. A return line for shielding 31 is provided around the force lines 11, 12, the sense line 13 and the guard line 21. Thus, the entire current supplied to the IC to be measured from the force lines 11, 12 returns to the DC voltage generator through the return line 31. The return line 31 encloses all of the force lines 11, 12, the sense line 13, and the guard line 21 to thereby reduce the cable inductance.
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