| 摘要 |
PROBLEM TO BE SOLVED: To measure the surface shape at a high precision for a short time by inserting a reference surface and test surface in a thermostatic chamber the apparatus has. SOLUTION: A Fizeau surface and sample surface are disposed in a thermostatic chamber 15. A light from an interferometer 11 is irradiated on a reference surface 12a and test surface 13a to produce an interference fringe. The interference fringe is measured and analyzed by an arithmetic unit 21 to measure the surface shape of a sample under test 13 wherein the required moving of the sample 13 in the optical axis direction and direction perpendicular thereto for this measurement and the correction of the inclination to the optical axis are all automatically made from outside the thermostatic chamber 15. A sample stand 17 chucks the sample to be measured through an axially movable chuck 101 having a rotary shaft and sets it at a measuring position. The outputs of sensors 41a-41n for measuring the temp. distribution in the chamber 15 are given to a temp. controller 42 to control so that the temp. in the chamber 15 is uniform and const. After ending the measurement, it is replaced with a sample housed in a next sample stand 18 by opening/closing a door 31.
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