| 摘要 |
PROBLEM TO BE SOLVED: To perform uniform laser annealing on the whole surface of a substrate to be treated and extend the area of a laser beam on a surface to be formed, by dividing a laser beam in one direction with a lens, superimposing the laser beam by an optical system, and making the boundary of the laser beam to be inputted in the lens, perpendicular to the dividing direction. SOLUTION: The boundary of an almost rectangular laser beam 601 is eliminated by using a slit 610, the laser beam is made straight, and a rectangular laser beam is obtained. The rectangular laser beam is made to enter a cylindrical lens group 603 as an optical system. The laser beam which is made to enter the cylindrical lens group 603 is divided in one direction and superimposed on a surface 609 to be irradiated by a cylindrical lens 604. A slit 610 is so arranged that the boundary of the laser beam is made straight perpendicular to the direction (widthwise direction) divided by the cylindrical lens group 603. |
