| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a wafer storage cassette which can stably hold even a thin and large diameter wafer, without generating flextures in the center of the wafer and which can prevent crackings or damages of wafers due to their mutual contacts. SOLUTION: A wafer storage cassette is constituted of an opening 5a for carrying wafers in and out and a support section 5b for support wafers. The support section 5b is constituted of support boards 6, which support wafers by the surface including the periphery and the center of gravity of the wafer. Each of the support boards 6 is formed with a holding section insertion region to allow a wafer holding section of a wafer carry-in/out means to be inserted. This cassette is especially suitable for storing thin (300μm or less) semiconductor wafers after being polished.</p> |
