| 摘要 |
PROBLEM TO BE SOLVED: To realize a stable interferometer having a wide measuring range wherein influence due to instability of alignment of optical components is little, size is reduced at the same time, assembling in an actuator or a precise apparatus is enabled, inertia is small, high speed operation is possible, and coupling loss is small, by unifying optical components in a body, and simplifying the constitution of mechanical movement mechanism for adjusting optical path difference. SOLUTION: In this interferometer, a thin film optical sensor FS capable of transmitting a laser light is used, a standing wave due to a combined wave of a laser light of a laser light source and a reflected laser light from a mirror is formed in the space between the laser light source and the mirror, the thin film optical sensor FS is arranged intersecting the standing wave, and a spatial interference fringes of the standing wave is detected. By using the interferometer, a displacement, velocity sensor is realized. Thus a parallel light having a large beam diameter can be used, and a measuring range is enlarged, so that a laser interferometer suitable for integration of each element can be constituted.
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