QUASI-STATIC FIBER PRESSURE SENSOR

摘要

This invention is a quasi-static fiber pressure sensor using self referenced interferometry based on a broadband semiconductor source (12) which probes the pressure plate deflection (24) within a Fabry-Perot cavity where phase is demodulated with a dual grating spectrometer (32) providing real time, high resolution remote measurement of pressure using optical interrogation of a deflecting pressure plate. This technique yields absolute gap measurement in real time over a wide range of gap lengths with nanometer resolution. By tailoring the pressure plate designed to cover the range of gaps and deflection can be resolved, pressure sensing with psi resolution can be obtained in a kpsig pressure range.