THIN FILM HEATING ELEMENT

摘要

A thin film heating element capable of withstanding power densities of 10-20 watts cm-2 and/or temperatures up to 650~C is disclosed. The preferred form of the heating element includes a layer of tin oxide doped with relatively larg e quantities of cerium and lanthanum deposited on an insulating substrate by pyrolysis of a solution of monobutyl tin trichloride containing the above ra re earth elements. The solution and subsequent oxide layer further include dono r and acceptor elements such as antimony and zinc to enhance the conductivity of the heating element.