发明名称 METHOD OF MAKING FLEXIBLY PARTITIONED METAL LINE SEGMENTS FOR A SIMULTANEOUS OPERATION FLASH MEMORY DEVICE WITH A FLEXIBLE BANK PARTITION ARCHITECTURE
摘要 A method of forming flexibly partitioned metal line segments (10 and 12) for separate memory banks in a simultaneous operation flash memory device with a flexible bank partition architecture comprises the steps of providing a basic metal layer (2) comprising a plurality of basic metal layer segments (2a, 2b, 2c, ...2j) separated by a plurality of gaps (6a, 6b, 6c, ...6i), each of the gaps having a predefined gap interval length, and providing a metal option layer (8) comprising a plurality of metal option layer segments on the basic metal layer (2), the metal option layer segments overlapping the gaps between the basic metal layer segments but leaving one of the gaps open, to form the metal line segments for the separate memory banks.
申请公布号 WO0017882(A1) 申请公布日期 2000.03.30
申请号 WO1999US18495 申请日期 1999.08.16
申请人 ADVANCED MICRO DEVICES, INC.;FUJITSU LIMITED 发明人 KUO, TIAO-HUA;KASA, YASUSHI;LEONG, NANCY;CHEN, JOHNNY;VAN BUSKIRK, MICHAEL
分类号 G11C16/04;G11C5/00;G11C8/10;G11C8/12;G11C16/08;H01L21/82;H01L21/8247;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):G11C5/00;G11C8/00;G11C16/06 主分类号 G11C16/04
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