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经营范围
发明名称
HIGH EFFICIENCY PHOTORESIST COATING
摘要
申请公布号
EP0988116(A1)
申请公布日期
2000.03.29
申请号
EP19980930108
申请日期
1998.06.10
申请人
MASSACHUSETTS INSTITUTE OF TECHNOLOGY
发明人
CHUN, JUNG-HOON;DERKSEN, JAMES;HAN, SANGJUN
分类号
B05C5/02;B05C11/08;B05D1/00;B05D1/26;G03F7/16;H01L21/00;H01L21/027;(IPC1-7):B05C11/02;B05D3/12
主分类号
B05C5/02
代理机构
代理人
主权项
地址
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