发明名称 Semiconductor device with capacitor and manufacturing method thereof
摘要 <p>A semiconductor device includes a capacitor and an interconnect layer disposed on a semiconductor substrate. The capacitor is formed of a bottom electrode, a capacitor dielectric film and a top electrode. The interconnect layer is formed of a first interconnect layer and a second interconnect layer laminated on the first interconnect layer. The bottom electrode and the first interconnect layer are formed of a first metal layer. The top electrode and the second interconnect layer are formed of a second metal layer. The capacitor dielectric film is formed only on the bottom electrode. &lt;IMAGE&gt;</p>
申请公布号 EP0989615(A2) 申请公布日期 2000.03.29
申请号 EP19990306545 申请日期 1999.08.19
申请人 SHARP KABUSHIKI KAISHA 发明人 ADAN, ALBERTO OSCAR
分类号 H01L27/04;H01L21/02;H01L21/3205;H01L21/768;H01L21/822;H01L23/52;H01L27/108;(IPC1-7):H01L29/92 主分类号 H01L27/04
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