Wafer handler for multi-station tool,申请号GB20000002672-传众专利搜索

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发明名称	Wafer handler for multi-station tool
摘要
申请公布号	GB0002672(D0)	申请公布日期	2000.03.29
申请号	GB20000002672	申请日期	1998.08.27
申请人	CVC PRODUCTS, INC.	发明人
分类号	B65G1/00;B25J9/06;H01L21/677;H01L21/687	主分类号	B65G1/00
代理机构		代理人
主权项
地址

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