发明名称 A METHOD FOR PURIFICATION OF ACIDS FOR USE IN SEMICONDUCTOR PROCESSING
摘要 A method of making high purity acids and their derivatives, particularly citric acid and ammonium citrate. These purified compositions are useful in the manufacture of integrated circuits for the semiconductor industry. Purification is done using strong acid ion exchange resins.
申请公布号 EP0966421(A4) 申请公布日期 2000.03.29
申请号 EP19970951629 申请日期 1997.12.08
申请人 ASHLAND INC. 发明人 HACKETT, THOMAS, B.
分类号 C07C51/42;C07C51/41;C07C51/47;C07C55/06;C07C59/265;H01L21/304 主分类号 C07C51/42
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