| 摘要 |
PROBLEM TO BE SOLVED: To easily form curved shape of different curvature according to directions by holding and polishing a polished member while rotatory-operated a lapping surface plate with a polishing surface of rotor shape or conical face shape which is a part of a tourus face. SOLUTION: A polishing surface 1 of a lapping surface plate 2 of rotor shape or conical face shape which is a part of a tourus face is formed in combined shape of two curvatures in the case of having radially protruding and recessed curvature and in the case of having circumferentially protruding and recessed curvature so as to be of conical shape protruded and recessed on the inner peripheral side of the lapping surface plate 2. In the case of polishing a polished member in the state of a low bar 105 cut out in bar shape from a wafer 104, the longitudinal direction is held in the radial direction of the lapping surface plate 2, and in the case of polishing the polished member cut into sliders 106, a plurality of sliders 106 are arranged and held in the radial direction of the lapping surface plate 2. The curved surface part 101 or the low bar 105 or each slider 106 are brought into sliding contact with the polishing surface 1, and the lapping surface plate 2 is rotatory-operated while reciprocating a support member 107 in the radial direction of the lapping surface plate 2.
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