摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for pulling a single crystal capable of reducing the vibration of a driving system, miniaturizing the apparatus and pulling the high-quality single crystal. SOLUTION: This apparatus for pulling a single crystal is obtained by installing a motor 13 for a high speed and a motor 14 for a low speed as driving sources for hoisting, connecting a first harmonic drive gearing 17 as a speed reducer to the motor 14 for the low speed, connecting a second harmonic drive gearing 18 in series with as a speed reducer the first harmonic drive gearing 17, providing a transmitting means separate from internal teeth in a circular spline having the internal teeth of the second harmonic drive gearing 18, interlocking the transmitting means with another transmitting means connected to an output shaft of the motor 13 for the high speed, taking out a power from a flex spline of the second harmonic drive gearing 18 and carrying out the hoisting operations in the apparatus having a constitution for hoisting a wire 30 to which a seed single crystal is attached with a hoisting drum 23 and pulling the single crystal.
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