| 摘要 |
PROBLEM TO BE SOLVED: To provide a hard film forming material remarkably improved in an endurance life as a sliding member or the like by forming a DLC film having high hardness and a low friction coefficient on the surface of a base material composed of metal or ceramic with tight adhesion by a relatively simple apparatus and a process. SOLUTION: On the surface of a base material composed of metal or ceramic, an amorphous carbon film is formed by a cathode discharge type arc ion plating method using a carbon target and moreover, on the boundary between the carbon film and the base material, a mixed layer of 10 to 500Åthickness composed of the base material constituting elements and film constituting elements is formed to obtain a high adhesion amorphous carbon film forming material.
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