POLISHING MACHINE AND REPLACING METHOD FOR POLISHING PAD

摘要

PROBLEM TO BE SOLVED: To easily replace a polishing pad used for polishing with a new one without requiring much time. SOLUTION: A polishing pad with a polishing cloth 3a adhered on the surface of a disk-shaped supporting pedestal is mounted on a disk-shaped pedestal 7 pivoted by a rotatable hollow shaft 2 and having a small gas passing hole 7a or a groove passage capable of introducing and discharging gas on its surface, and the polishing pad is fixed to the disk-shaped pedestal by reducing a pressure in the small gas passing hole or the groove of the disk shaped pedestal.