APPARATUS AND METHOD FOR DETECTING DMAH USING A PARTICLE-SENSING DETECTOR,申请号EP19980923629-传众专利搜索

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发明名称	APPARATUS AND METHOD FOR DETECTING DMAH USING A PARTICLE-SENSING DETECTOR
摘要
申请公布号	EP0988537(A1)	申请公布日期	2000.03.29
申请号	EP19980923629	申请日期	1998.05.21
申请人	APPLIED MATERIALS, INC.	发明人	SCHMITT, JOHN, V.
分类号	G01N27/64;G01N21/47;G01N31/00;G01N33/00;(IPC1-7):G01N27/64	主分类号	G01N27/64
代理机构		代理人
主权项
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