Acceleration sensor and a method of producing same

摘要

An acceleration sensor including: a fixed substrate; a fixed electrode mounted on the fixed substrate; a movable body, supported by the fixed substrate and displaced in response to an applied acceleration; a movable electrode which is arranged in the movable body in such a manner that the movable electrode faces the fixed electrode to form, together with the fixed electrode, a capacitor; wherein the movable electrode is mounted between grooves formed in the movable body. The acceleration sensor features improved mechanical strength, compact design and improved sensing accuracy while permitting the manufacturing process to be simplified.