发明名称 SURFACE TREATING DEVICE AND SURFACE TREATING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a surface treating device capable of efficiently executing the carrying of an object and moreover simple in the structure. SOLUTION: This device is provided with a carrying passage L guiding an object 6, a cover 13 whose lower direction is opened, also supported to the carrying passage L from the upper direction so as to be freely attachable and detachable, and, in the case of being contacted with the carrying passage L, forming a sealed space in the upper direction of the carrying passage L, an attaching and detaching means allowing the cover 13 to attach and detach to the carrying passage L and arms 15 and 16 penetrating the object 6 on the carrying passage L into the lower direction of the cover 13 and/or retracting it from the lower direction of the cover in the case the cover 13 is apart from the carrying passage L.
申请公布号 JP2000087265(A) 申请公布日期 2000.03.28
申请号 JP19990191458 申请日期 1999.07.06
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 HAJI HIROSHI
分类号 H01L21/677;C23F4/00;H01L21/302;H01L21/3065;H01L21/68;(IPC1-7):C23F4/00 主分类号 H01L21/677
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