| 摘要 |
PROBLEM TO BE SOLVED: To control the gap between a high voltage electrode and a ground electrode (discharge gap) to be uniform in the circumferential direction and in the axial direction. SOLUTION: A pair of current terminals 8, each having a recess 9, a recess 10 and a hole 11, are provided, and both ends of the ground electrode 4 are fitted to the respective recesses 9, while the both ends of the high voltage electrode 5 disposed in the axial position of the ground electrode 4 are inserted in the respective holes 11. The inner part and outer part of each current terminal 8 are communicated to form an inlet 13 of the source gas and a discharge port 14 of ozone.
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