| 摘要 |
PROBLEM TO BE SOLVED: To reduce the running cost of ozone production by a silent discharge ozone generator, to suppress large consumption of electric power to obtain high concn. ozone at a lower cost than that of a conventional method, and thereby to realize more practical treatment with ozone which is friendly with the environment. SOLUTION: The source gas consists of industrial oxygen gas having a total content of oil and hydrocarbons of <=15 ppm by volume <=-50 deg.C dew point (expressed in terms of at atmospheric pressure) and >=99.5% oxygen purity and 0.5 to 5 vol.% dry air having a total content of oil and hydrocarbons of <=15 ppm by volume and <=-50 deg.C dew point (expressed in terms of at atmospheric pressure). The source gas is supplied to a silent discharge ozone generator to produce ozone. The ozone concn. produced is preferably >=6 wt.%.
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