| 摘要 |
PROBLEM TO BE SOLVED: To quickly detect a mark provided on a carrier plate to improve the working efficiency. SOLUTION: The wafer affixing device is provided with a rotary table device 32 which has an affixing head 30 for holding a wafer 20 and positioning the wafer 20 on a carrier plate 10 to affix it on the plate, and a rotary stand 34 rotating while supporting and holding the carrier plate 10 and which is also capable of indexing and adjusting the relative positions of the affixing head 30 and the carrier plate 10 with respect to the peripheral direction of the carrier plate 10, a mark 12 provided on the carrier plate 10, plural mark detecting devices 36a, 36b provided on a base body so as to detect the mark 12, and a position control device 38 for controlling the rotary table device 32 in order to index the affixing position for the wafer on the carrier plate 10 on the basis of the position of the mark 12 detected by either one of the plural mark detecting devices 36a, 36b. |
