| 摘要 |
PROBLEM TO BE SOLVED: To obtain a workpiece holding agent which can precisely and stably fix a workpiece on the fixed plate of a polisher by pressure-sensitive adhesiveness during polishing, can permit easy release when the workpiece is released from the fixed plate, and does not necessitate conventional cleaning with an organic solvent or a surfactant and to provide a method for releasing a workpiece held with the agent. SOLUTION: This agent is the one informed from an adhesive composition containing a side-chain-crystallizable polymer having a melting point continuing over a temperature range narrower than about 15 deg.C and a pressure-sensitive adhesive, wherein the polymer is contained in an amount of 1-30 wt.% based on the composition, and the side-chain crystallizable polymer mainly consists of an acrylic ester and/or a methacrylic ester in each of which the side chain is a 16C or higher linear alkyl. |
