发明名称 MANUFACTURE OF OPTICAL ELEMENT FOR ULTRAVIOLET RAYS
摘要 PROBLEM TO BE SOLVED: To provide the manufacture by which an optical element for ultraviolet rays can be manufactured while inhibiting reduction in ultraviolet transmissivity of the element. SOLUTION: This manufacture comprises pressing heated and softened quartz glass 1 with molds 2 and 3 which have forming surface shapes nearly the same as those of the optical-functional surfaces of an optical element respectively and to which pressure is applied, to transfer the forming surface shapes of the molds 2 and 3 to the quartz glass 1, wherein the atmosphere used at the time of performing the heating or cooling operation, contains at least gaseous hydrogen and the atmosphere used at the time of performing the forming operation, is vacuum or contains at least gaseous hydrogen.
申请公布号 JP2000086254(A) 申请公布日期 2000.03.28
申请号 JP19980263672 申请日期 1998.09.17
申请人 NIKON CORP 发明人 TAKANO JUN;NEGISHI MITSUMASA;KITAZAWA KAZUO;IGUCHI HIROAKI
分类号 C03B20/00;C03B11/00;C03B11/08;(IPC1-7):C03B11/00 主分类号 C03B20/00
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