| 摘要 |
PROBLEM TO BE SOLVED: To eliminate the drying of a filter part and to prevent the lowering of flow rate through a filter for liquid chemical by providing a pipe line for discharging air, which extends downward from vicinity of the upper end and leads to the outside of the filter, in the filter part communicated with a flow-out port of the filter for liquid chemical. SOLUTION: In a cleaning vessel for cleaning a material to be cleaned such as a substrate with the liquid chemical 1, discharge pipes are provided on both sides of the lower side of the inside of a vessel body and are connected to a pump and a filter 20A through a pipe line. In the filter 20A, a pipe line 28 for discharging air is provided in the filter part 25 and is arranged on the same axis as the filter part 25. The upper end part of the pipe line 28 for discharging air is positioned near a lid body 25a of the filter part 25 and the lower end part extends to the outside of a housing 21 of the filter 20A from the bottom part (near the connected position to a flow-out port 23) of the filter part 25. As a result, the air A is prevented from flowing out with the liquid chemical 1, the sticking of particles on the surface of the material to be cleaned is prevented and etching defect is eliminated.
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