| 摘要 |
PROBLEM TO BE SOLVED: To obtain a polishing composition showing a high polishing rate, providing good polish quality, and foaming little during being handled. SOLUTION: This composition comprises an abrasive, a polycarboxylic acid type polymer having carboxyl groups and polyalkylene oxide structures as side chains and an antifoam. The composition provides a high polishing rate, and a high working efficiency, causes surface defects little, provides excellent dimensional accuracy, foams little during use, and is suited for various precision polishing operations.
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