发明名称 |
Single crystal pulling method |
摘要 |
A single crystal pulling method includes the steps of: immersing seed crystal in a melt; growing single crystal around the seed crystal and reducing its diameter to remove dislocation in the single crystal; prior to forming a straight waist product portion of single crystal having a prescribed diameter, forming a straight waist holding portion having a diameter smaller than the prescribed diameter; holding the straight waist holding portion by using a single crystal holding device; and pulling the straight waist product portion while the straight waist holding portion is held. Preferably the step of forming the straight waist holding portion includes a step of varying a pulling speed to make unevenness in the surface thereof.
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申请公布号 |
US6042644(A) |
申请公布日期 |
2000.03.28 |
申请号 |
US19980121858 |
申请日期 |
1998.07.24 |
申请人 |
KOMATSU ELECTRONIC METALS CO., LTD. |
发明人 |
KUROSAKA, SHOEI;INAGAKI, HIROSHI;KAWASHIMA, SHIGEKI;TOMIOKA, JUNSUKE |
分类号 |
C30B15/22;C30B15/30;(IPC1-7):C30B15/32 |
主分类号 |
C30B15/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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