发明名称 ROLLING BEARING FOR SEMICONDUCTOR MANUFACTURING FACILITY
摘要 PROBLEM TO BE SOLVED: To obtain a bearing with low torque which is low in dusting characteristics and excellent in durability, by forming parts of a bearing by nonmagnetic material, and by housing in the bearing a solid lubricating component constituted of a synthetic resin base material on which a lubricating ingredient is dispersed and held. SOLUTION: For non-magnetism of a whole bearing for example, an inner ring 1, an outer ring 2 and a rolling member 3 are made from ceramic, and a cage 4 is made from austenitic stainless steel. A lubricating component 5 housed in the bearing is a solid and is constituted of a synthetic resin base material on which a lubricating ingredient is dispersed and held. A predetermined amount of lubricating grease or lubricating oil is mixed with a predetermined amount of ultrahigh molecular weight polyolefin powder as base material. At a gel point of the ultrahigh molecular weight polyolefin powder or more and when the lubricating grease is used, the lubricating ingredient is dispersed and held at a temperature of the dropping point or less, and is cooled to obtain the lubricating component 5. Oil is gradually oozed from the lubricating component 5 even in a standing state, so that the lubrication of a raceway face of the bearing can be ensured, and durability and lower dusting characteristics can be increased.
申请公布号 JP2000087982(A) 申请公布日期 2000.03.28
申请号 JP19980263483 申请日期 1998.09.17
申请人 NTN CORP 发明人 YAMADA HIROSHI
分类号 F16C33/66;(IPC1-7):F16C33/66 主分类号 F16C33/66
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