| 发明名称 |
Multi-stage single-drive FOUP door system |
| 摘要 |
Two FOUPs are stacked and moved together towards an equipment wall by a horizontal actuator. FOUP doors are withdrawn as a unit by a horizontal actuator, and lowered as a unit by a vertical actuator to provide access to the interior of the FOUPs.
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| 申请公布号 |
US6042324(A) |
申请公布日期 |
2000.03.28 |
| 申请号 |
US19990277662 |
申请日期 |
1999.03.26 |
| 申请人 |
ASM AMERICA, INC. |
发明人 |
AGGARWAL, RAVINDER;STEVENS, RONALD R. |
| 分类号 |
B65G49/07;H01L21/673;H01L21/677;(IPC1-7):B65G49/07;B65G47/06;H01L21/68 |
主分类号 |
B65G49/07 |
| 代理机构 |
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代理人 |
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| 主权项 |
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