| 摘要 |
PROBLEM TO BE SOLVED: To enhance various strengths at the actuator part by providing a piezoelectric element in which the actuator part has trapezoidal cross-section in the direction orthogonal to a piezoelectric element film, i.e., the oscillating direction of the actuator part, enlarged to the pressure chamber electrode side. SOLUTION: A piezoelectric element 2 at the actuator part has trapezoidal cross-section in the direction orthogonal to the film face thereof, i.e., the oscillating direction of an actuator part, enlarged to the diaphragm/pressure chamber electrode 1 side. Consequently, the side face inclines against the film face of the diaphragm/pressure chamber electrode 1. Since the joint to the pressure chamber electrode 1 composed of a substance having high Young's modulus is not steep at the time of deformation incident to ink ejection, undue concentration of stress is prevented. Furthermore, stress generated at the side wall part due to some cause of production, or the like, can be dispersed. According to the structure, various strengths can be enhanced at the actuator part including the pressure chamber electrode 1 and the counter-pressure chamber electrode 3. |
