Thin film actuated mirror including a seeding member and an electrodisplacive member made of materials having the same crystal structure and growth direction

摘要

An array of thin film actuated mirrors includes: an active matrix including a substrate, an array of connecting terminals; and an array of actuating structures, each of the actuating structures including an upper electrode functioning as a mirror as well as a common bias electrode, an electrodisplacive member made of a piezoelectric material, a seeding member made of a material having the same crystal structure and growth direction as that of the piezoelectric material constituting the electrodisplacive member, a lower electrode functioning as a signal electrode, an elastic member and a via contact.