摘要 |
An improved Fermi FET structure with low gate and diffusion capacity allows cond uction carriers to flow within the channel at a predetermined depth in the substrate below the gate, without requiring an i nversion layer to be created at the surface of the semiconductor. The low capacity Fermi FET is preferably implemented using a Fermi Tub having a predetermined depth, and with a conductivity type opposite the substrate conductivity type and the same c onductivity type as the drain and source diffusions.
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