| 摘要 |
PROBLEM TO BE SOLVED: To appropriately remove chemical contaminants in a clean-room equipment, clean bench or clean booth, or the like, to improve the maintainability of a chemical filter, to secure the degree of freedom in installation, to reduce the height and cost of an equipment such as the clean room and further to provide an air purifying device furnished with the chemical filter and a dust removing filter optimum for these equipments. SOLUTION: A main dust removing filter 1 is provided on the upstream side of an air current to be purified, a chemical filter 2 and an auxiliary dust removing filter 3 are successively furnished on the downstream side of the filter, the chemical filter 2 and auxiliary dust removing filter 3 are provided in one structure to constitute a non-dusting chemical filter 4, and the non-dusting chemical filter is made attachable and detachable to and from the air purifying device. |
