发明名称
摘要 PURPOSE:To provide an Au superfine sire for semiconductor element use, which improves the sphericity of a ball, which is formed at the time of ball bonding or at the time of bump bonding, in the range of a prescribed composition to improve the bonding strength of the ball at the time of thermal pressure-bonding of the ball to an electrode on a chip or an outer lead as well as to lower the height of a loop at the time of bonding and is capable of increasing the reliability and practicality of a thin semiconductor device. CONSTITUTION:An Au superfine wire for semiconductor element use is obtained by a method wherein 5 to 12wt ppm of Ca, 4 to 16wt ppm of Y and 3 to 13wt ppm of La are doped to an inevitable impurity-containing high-purity Au film within the range of the total amount of 15 to 30wt ppm.
申请公布号 JP3026381(B2) 申请公布日期 2000.03.27
申请号 JP19910338906 申请日期 1991.12.20
申请人 发明人
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
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