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发明名称
摘要
申请公布号	JP3025811(B2)	申请公布日期	2000.03.27
申请号	JP19910060937	申请日期	1991.02.18
申请人		发明人
分类号	H01L21/205;H01L21/285;H01L21/31;H01L21/677;H01L21/68;(IPC1-7):H01L21/68	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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