CONTROL EXHAUST SYSTEM FOR SUPER HIGH PURITY TRANSFER SYSTEM OF LIQUEFIED COMPRESSED GAS

摘要

PURPOSE: A control exhaust system is provided to decrease the volatile impurity existed in the super high purity gas product which is transferred from a storage container including a non-cryogenic liquid product. CONSTITUTION: The volatile impurity is decreased by the steps of:exhausting a part of vapor from a vapor space to a condenser(82); condensing a first part of the exhausted vapor and not condensing a second part of it by cooling the exhausted vapor at a temperature lower than the boiling point of a liquid product and higher than the boiling point of a volatile impurity in the condenser; and decreasing the volatile impurity existed in the non-cryogenic liquid product and the vapor of a storage container which includes a vapor space on the non-cryogenic liquid product.