TRANSPARENT CONDUCTIVE FILM EXCELLENT IN TRANSPIRATION OF INFRARED RAY AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A transparent conductive film is provided to have an excellent transmitting rate over a wide wave length area from a visible ray to infrared rays. CONSTITUTION: The transparent conductive film which displays more than 80% of the high transmitting rate in 450-3200nm of wave length area, is manufactured by heating a film that has an indium-zinc oxide(IZO) as a main ingredient under the low oxygen atmosphere. The resistance moment of the transparent conductive film is less than 3.0 multiples 10¬-3 angstrom cm and the film is originally amorphous shape or a non-crystal. The film is manufactured by a sputtering method.