NON-CONTACT HOLDER FOR WAFER-LIKE ARTICLES

摘要

PURPOSE: A holder is provided which holds a wafer-like article without physical contact between the holder and the article. CONSTITUTION: A holder for wafer-like articles is formed by providing a platform(10) having a wafer-like article facing surface that includes at least one annular groove therein. The annular groove has a ceiling surface(14) therein which is provided with an opening(24). A gas conducting conduit(15) is connected to the opening. A gas, which introduced into the conduit, exits the conduit through the opening. By choosing a particular orientation of the conduit relative to the annular groove, the gas exiting the opening can be caused to circulate in a clockwise or counter clockwise fashion. The circular flow of gas causes the formation of a vortex adjacent to the article facing surface. A wafer-like article may be held in a suspended state adjacent to the wafer-like article facing surface without contact by the vortex and the gas flowing between the wafer-like article and the article facing surface.