| 摘要 |
PURPOSE: An exposure data drawing method is provided to reduce the data amount by assigning the region not exposed to a diagram corresponding to exposure data, coordinate value, or numerical value. CONSTITUTION: In the exposure data drawing method, after setting the coordinates among a file, the exposure data is arranged to correspond coordinate values of the coordinates. A region where the exposure data is not arranged among the file is set. No exposure region is appointed by a numerical value, is appointed by the coordinate value, or is appointed by a cell which comprises a diagram corresponding to an exposure pattern or the predetermined number of diagrams. |
